Nanoscale dielectric microscopy of non-planar samples by lift-mode electrostatic force microscopy
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Van Der Hofstadt, Marc; Fabregas, Rene; Biagi, Maria Chiara; Fumagalli, Laura; Gomila, GabrielMateria
AFM EFM Dielectric Constant Dielectrics Non-Planar Surfaces
Fecha
2016Resumen
Lift-mode electrostatic force microscopy (EFM) is one of the most convenient imaging modes to
study the local dielectric properties of non-planar samples. Here we present the quantitative
analysis of this imaging mode. We introduce a method to quantify and subtract the topographic
crosstalk from the lift-mode EFM images, and a 3D numerical approach that allows for
extracting the local dielectric constant with nanoscale spatial resolution free from topographic
artifacts. We demonstrate this procedure by measuring the dielectric properties of micropatterned
SiO2 pillars and of single bacteria cells, thus illustrating the wide applicability of our approach
from materials science to biology.