Nanoscale dielectric microscopy of non-planar samples by lift-mode electrostatic force microscopy Van Der Hofstadt, Marc Fabregas, Rene Biagi, Maria Chiara Fumagalli, Laura Gomila, Gabriel AFM EFM Dielectric Constant Dielectrics Non-Planar Surfaces Lift-mode electrostatic force microscopy (EFM) is one of the most convenient imaging modes to study the local dielectric properties of non-planar samples. Here we present the quantitative analysis of this imaging mode. We introduce a method to quantify and subtract the topographic crosstalk from the lift-mode EFM images, and a 3D numerical approach that allows for extracting the local dielectric constant with nanoscale spatial resolution free from topographic artifacts. We demonstrate this procedure by measuring the dielectric properties of micropatterned SiO2 pillars and of single bacteria cells, thus illustrating the wide applicability of our approach from materials science to biology. 2025-02-02T10:06:42Z 2025-02-02T10:06:42Z 2016 journal article https://hdl.handle.net/10481/101779 10.1088/0957-4484/27/40/405706 eng People-2012-ITN/FP7/317116 http://creativecommons.org/licenses/by-nc-nd/4.0/ open access Attribution-NonCommercial-NoDerivatives 4.0 Internacional