Geometrical variability impact on the gate tunneling leakage mechanisms in FinFETs

Abstract

Given the critical role that quantum tunneling effects play in the behavior of nanoelectronic devices, it is essential to investigate the influence and restraints of these phenomena on the overall transistor performance. In this work, a previously developed gate leakage model, incorporated into an in-house 2D Multi-Subband Ensemble Monte Carlo simulation framework, is employed to analyze the leakage current flowing across the gate insulator. The primary objective is to evaluate how variations in key geometrical parameters (specifically, gate oxide and semiconductor thicknesses dimensions) affect the magnitude and bias dependence of tunnelinginduced leakage. Simulations are performed on a representative FinFET structure, and the results reveal that tunneling effects become increasingly pronounced at low gate voltages in devices with thinner oxides and thicker semiconductor thickness. These findings underscore the relevance of incorporating quantum tunneling mechanisms in predictive modeling of advanced transistor architectures.