TY - GEN AU - Donetti, Luca AU - Medina Bailón, Cristina AU - Padilla De la Torre, José Luis AU - Sampedro Matarín, Carlos AU - Gámiz Pérez, Francisco Jesús PY - 2025 UR - https://hdl.handle.net/10481/110243 AB - The capacitance of the gate oxide is a crucial parameter to model the performance of MOSFETs. The traditional expression used to compute it stems from the parallel-plate capacitor formula. While its use is appropriate for planar devices, it has been... LA - spa KW - Equivalent oxide thickness (EOT) KW - gate insulator capacitance KW - gate-all-around (GAA) KW - MOSFET KW - nanosheet MOSFET TI - On the Capacitance of Nanosheet Transistors DO - 10.1109/TED.2025.3559482 ER -