TY  - GEN 
AU  - Martínez, Alberto
AU  - Márquez González, Carlos
AU  - Lorenzo Lazaro, Francisco
AU  - Gutierrez Parejo, Francisco
AU  - Caño-García, Manuel
AU  - Ávila Gómez, Jorge Pablo
AU  - Galdón Gil, José Carlos
AU  - Ortega López, Rubén
AU  - Navarro Moral, Carlos
AU  - Donetti, Luca
AU  - Gámiz Pérez, Francisco Jesús
PY  - 2025
UR  - https://hdl.handle.net/10481/107465
AB  - The relentless scaling of semiconductor technology demands materials beyond silicon to sustain performance improvements. Transition metal dichalcogenides (TMDs), particularly MoS2, offer excellent electronic properties; however, achieving scalable and...
LA  - eng
PB  - American Chemical Society
TI  - Wafer-Scale Demonstration of BEOL-Compatible Ambipolar MoS2 Devices Enabled by Plasma-Enhanced Atomic Layer Deposition
DO  - 10.1021/acsami.5c12014
ER  -