TY  - GEN 
AU  - Fabregas, Rene
AU  - Gomila, Gabriel
PY  - 2020
UR  - https://hdl.handle.net/10481/101847
AB  - Electrostatic force microscopy (EFM) can image nanoscale objects buried below the surface. Here, we theoretically show that this capability can be used to obtain nanotomographic information, ie, the physical dimensions and dielectric properties, of...
LA  - eng
KW  - Electrostatic Force Microscopy
KW  - Dielectric Nanotomography
KW  - Finite Element Modeling
KW  - Inverse Optimization
KW  - Subsurface Imaging
KW  - Nanostructure Characterization
TI  - Dielectric Nanotomography Based on Electrostatic Force Microscopy: a Numerical Analysis.
DO  - 10.1063/1.5122984
ER  -