Dielectric Nanotomography Based on Electrostatic Force Microscopy: a Numerical Analysis. Fabregas, Rene Gomila, Gabriel Electrostatic Force Microscopy Dielectric Nanotomography Finite Element Modeling Inverse Optimization Subsurface Imaging Nanostructure Characterization Government of Spain - cached. Effective date: 2011/6 Embargo: 12 months. Funding acknowledgment in paper: …Generalitat de Catalunya through Grant No. 2017-SGR1079. European Commission - cached. Effective date: 2013/12 Embargo (6 months) Funding acknowledgment in paper: …H2020-MSCA-721874 (SPM2.0). Electrostatic force microscopy (EFM) can image nanoscale objects buried below the surface. Here, we theoretically show that this capability can be used to obtain nanotomographic information, ie, the physical dimensions and dielectric properties, of buried nano-objects. These results constitute a first step toward implementing a nondestructive dielectric nanotomography technique based on EFM with applications in materials sciences and life sciences. 2025-02-03T08:54:33Z 2025-02-03T08:54:33Z 2020 journal article https://hdl.handle.net/10481/101847 10.1063/1.5122984 eng European Union’s Horizon 2020/Marie Sklodowska-Curie/721874 http://creativecommons.org/licenses/by-nc-nd/4.0/ embargoed access Attribution-NonCommercial-NoDerivatives 4.0 Internacional