Full-wave modeling of broadband near field scanning microwave microscopy Wu, Bi Yi Sheng, Xin-Qing Fabregas, Rene Hao, Yang Full-wave Modeling Scanning Microwave Microscopy (SMM) Finite Element Method (FEM) Dielectric Spectroscopy Radiation and Scattering Losses A three-dimensional finite element numerical modeling for the scanning microwave microscopy (SMM) setup is applied to study the full-wave quantification of the local material properties of samples. The modeling takes into account the radiation and scattering losses of the nano-sized probe neglected in previous models based on low-frequency assumptions. The scanning techniques of approach curves and constant height are implemented. In addition, we conclude that the SMM has the potential for use as a broadband dielectric spectroscopy operating at higher frequencies up to THz. The results demonstrate the accuracy of previous models. We draw conclusions in light of the experimental results. 2025-02-03T07:01:29Z 2025-02-03T07:01:29Z 2017 journal article https://hdl.handle.net/10481/101795 10.1038/s41598-017-13937-5 eng People-2012-ITN/FP7/317116 http://creativecommons.org/licenses/by-nc-nd/4.0/ open access Attribution-NonCommercial-NoDerivatives 4.0 Internacional