MULHACEN, enhanced multi-subband Monte Carlo simulator for nonplanar FETs

Abstract

In this work, we present Mulhacen, a 3D multi-subband simulator developed for the accurate study of nonplanar devices which are at the core of present and future technology nodes. It allows to consider electrons in different conduction band valleys and, among its main features, we can highlight the accurate evaluation of quantum effects in the plane transverse to transport through the solution of the 2D Schrödinger equation in several device cross sections, as well as Monte Carlo description of transport. The simulator is based on a finite elements discretization, which allows an accurate description of realistic device geometries.