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Dielectric Nanotomography Based on Electrostatic Force Microscopy: a Numerical Analysis.

dc.contributor.authorFabregas, Rene
dc.contributor.authorGomila, Gabriel
dc.date.accessioned2025-02-03T08:54:33Z
dc.date.available2025-02-03T08:54:33Z
dc.date.issued2020
dc.identifier.urihttps://hdl.handle.net/10481/101847
dc.descriptionGovernment of Spain - cached. Effective date: 2011/6 Embargo: 12 months. Funding acknowledgment in paper: …Generalitat de Catalunya through Grant No. 2017-SGR1079. European Commission - cached. Effective date: 2013/12 Embargo (6 months) Funding acknowledgment in paper: …H2020-MSCA-721874 (SPM2.0).es_ES
dc.description.abstractElectrostatic force microscopy (EFM) can image nanoscale objects buried below the surface. Here, we theoretically show that this capability can be used to obtain nanotomographic information, ie, the physical dimensions and dielectric properties, of buried nano-objects. These results constitute a first step toward implementing a nondestructive dielectric nanotomography technique based on EFM with applications in materials sciences and life sciences.es_ES
dc.language.isoenges_ES
dc.rightsAttribution-NonCommercial-NoDerivatives 4.0 Internacional*
dc.rights.urihttp://creativecommons.org/licenses/by-nc-nd/4.0/*
dc.subjectElectrostatic Force Microscopyes_ES
dc.subjectDielectric Nanotomographyes_ES
dc.subjectFinite Element Modelinges_ES
dc.subjectInverse Optimizationes_ES
dc.subjectSubsurface Imaginges_ES
dc.subjectNanostructure Characterizationes_ES
dc.titleDielectric Nanotomography Based on Electrostatic Force Microscopy: a Numerical Analysis.es_ES
dc.typejournal articlees_ES
dc.relation.projectIDEuropean Union’s Horizon 2020/Marie Sklodowska-Curie/721874es_ES
dc.rights.accessRightsembargoed accesses_ES
dc.identifier.doi10.1063/1.5122984


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