@misc{10481/101795, year = {2017}, url = {https://hdl.handle.net/10481/101795}, abstract = {A three-dimensional finite element numerical modeling for the scanning microwave microscopy (SMM) setup is applied to study the full-wave quantification of the local material properties of samples. The modeling takes into account the radiation and scattering losses of the nano-sized probe neglected in previous models based on low-frequency assumptions. The scanning techniques of approach curves and constant height are implemented. In addition, we conclude that the SMM has the potential for use as a broadband dielectric spectroscopy operating at higher frequencies up to THz. The results demonstrate the accuracy of previous models. We draw conclusions in light of the experimental results.}, keywords = {Full-wave Modeling}, keywords = {Scanning Microwave Microscopy (SMM)}, keywords = {Finite Element Method (FEM)}, keywords = {Dielectric Spectroscopy}, keywords = {Radiation and Scattering Losses}, title = {Full-wave modeling of broadband near field scanning microwave microscopy}, doi = {10.1038/s41598-017-13937-5}, author = {Wu, Bi Yi and Sheng, Xin-Qing and Fabregas, Rene and Hao, Yang}, }